Concepedia

W. Stickel

WS

17

Publications

497

Citations

13

H-Index

1965

Active since

Affiliations

IBM (United States)(Current)

Technische Universität Berlin

W. Stickel is an author at IBM (United States) specializing in engineering, microscopy, and instrumentation.

Top concepts

EngineeringMicroscopyPhysicsApplied PhysicsInstrumentationMedicineOphthalmologyMicroelectronicsOptoelectronicsElectrical Engineering

Publications per year

1965–2001

17

Publications

17

Interaction of 25-keV Electrons with Lattice Vibrations in LiF. Experimental Evidence for Surface Modes of Lattice Vibration

H. Boersch, J. Geiger, W. Stickel · Physical Review Letters · 1966 · 93 citations

Materials Science, Lattice Vibration, Engineering +12

Projection reduction exposure with variable axis immersion lenses: Next generation lithography

H. C. Pfeiffer, R. S. Dhaliwal, S. D. Golladay et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 61 citations

Engineering, Microscopy, Optic Design +18

PREVAIL - An e-beam stepper with Variable Axis Immersion Lenses

H. C. Pfeiffer, W. Stickel · Microelectronic Engineering · 1995 · 55 citations

Geometrical Optic, E-beam Stepper, Beam Optic +1

PREVAIL—Electron projection technology approach for next-generation lithography

R. S. Dhaliwal, W. A. Enichen, S. D. Golladay et al. · IBM Journal of Research and Development · 2001 · 54 citations

Projection Level, Optical Materials, Engineering +15

Energy Losses of Fast Electrons in Nitrogen

J. Geiger, W. Stickel · The Journal of Chemical Physics · 1965 · 35 citations

Engineering, Physics, Energy Efficiency +8

Rows per page

1–5 of 17