Hiromitsu Takase

Carbon deposition on multi-layer mirrors by extreme ultra violet ray irradiation

Shuichi Matsunari, Takashi Aoki, K. Murakami et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +9

Analysis of carbon deposition on multilayer mirrors by using two different beamlines

Takahiro Nakayama, Akira Miyake, Hiromitsu Takase et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 14 citations

Engineering, Materials Engineering, Materials Science +10

Quantitative TOF-SIMS imaging of DNA microarrays produced by bubble jet printing technique and the role of TOF-SIMS in life science industry

Hiroyuki Hashimoto, Kumi Nakamura, Hiromitsu Takase et al. · Applied Surface Science · 2004 · 12 citations

Life Sciences, Bioengineering, Biotechnology +8

<i>In situ</i> x-ray absorption near-edge structure analysis for extreme ultraviolet lithography projection optics contamination

Masahito Niibe, Yukinobu Kakutani, Keigo Koida et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 10 citations

Natural Sciences, Materials Engineering, Materials Science +16