Concepedia

Keigo Koida

KK

Statistics

Publications

2

Citations

26

H-Index

2

Active since

2007

Affiliations

University of Hyogo(Current)

Keigo Koida is an author at University of Hyogo specializing in optical properties, applied physics, and engineering.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceOptical PropertiesHealthX-ray ImagingCrystallographyOptical SystemsOptoelectronics

Publications per year

2007–2009

2

Publications

2

Study on contamination of projection optics surface for extreme ultraviolet lithography

Keigo Koida, Masahito Niibe · Applied Surface Science · 2009 · 16 citations

Materials Science, Extreme Ultraviolet Lithography, Engineering +11

<i>In situ</i> x-ray absorption near-edge structure analysis for extreme ultraviolet lithography projection optics contamination

Masahito Niibe, Yukinobu Kakutani, Keigo Koida et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 10 citations

Optical Materials, X-ray Spectroscopy, Engineering +17

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