Concepedia

Author

Shuichi Matsunari

University of Hyogo

Also Known As

S. Matsunari, Shuichi Matsunari

23

Publications

112

Citations

7

H-Index

16

Concepts

All Affiliations

University of Hyogo
SM

About

Shuichi Matsunari is an author at University of Hyogo specializing in optical properties, applied physics, and materials science.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

2

2

28

2

Health Sciences

2

2

28

3

Applied Physics

2

2

28

4

Chemical Engineering

1

1

10

5

Chemistry

1

1

18

Shuichi Matsunari

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2

Publications

28

Citations

2

H-Index

YearCitations

Carbon deposition on multi-layer mirrors by extreme ultra violet ray irradiation

Shuichi Matsunari, Takashi Aoki, K. Murakami,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2007

18

<i>In situ</i> x-ray absorption near-edge structure analysis for extreme ultraviolet lithography projection optics contamination

Masahito Niibe, Yukinobu Kakutani, Keigo Koida,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

2007

10

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