Concepedia

Shuichi Matsunari

SM

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Publications

2

Citations

28

H-Index

2

Active since

2007

Affiliations

University of Hyogo(Current)

Shuichi Matsunari is an author at University of Hyogo specializing in optical properties, applied physics, and materials science.

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Publications per year

2007–2007

2

Publications

2

Carbon deposition on multi-layer mirrors by extreme ultra violet ray irradiation

Shuichi Matsunari, Takashi Aoki, K. Murakami et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 18 citations

, , +15

<i>In situ</i> x-ray absorption near-edge structure analysis for extreme ultraviolet lithography projection optics contamination

Masahito Niibe, Yukinobu Kakutani, Keigo Koida et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 10 citations

, , +17

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