Concepedia

Shinji Himori

SH

Statistics

Publications

2

Citations

38

H-Index

2

Active since

2001

Affiliations

Tokyo Electron (Japan)(Current)

Shinji Himori is an author at Tokyo Electron (Japan) specializing in microelectronics, electrical engineering, and electromagnetic compatibility.

Top concepts

Publications per year

2001–2005

2

Publications

2

Investigation of Etch Rate Uniformity of 60 MHz Plasma Etching Equipment

Akira Koshiishi, Youichi Araki, Shinji Himori et al. · Japanese Journal of Applied Physics · 2001 · 23 citations

, , +11

Dual-Frequency Superimposed RF Capacitive-Coupled Plasma Etch Process

Akihiro Kojima, Hisataka Hayashi, Itsuko Sakai et al. · Japanese Journal of Applied Physics · 2005 · 15 citations

, , +15

1–2 of 2