Concepedia

Youichi Araki

YA

Statistics

Publications

1

Citations

23

H-Index

1

Active since

2001

Affiliations

Tokyo Electron (Japan)(Current)

Youichi Araki is an author at Tokyo Electron (Japan) specializing in computational electromagnetics, microelectronics, and instrumentation.

Top concepts

Publications per year

2001–2001

1

Publications

1

Investigation of Etch Rate Uniformity of 60 MHz Plasma Etching Equipment

Akira Koshiishi, Youichi Araki, Shinji Himori et al. · Japanese Journal of Applied Physics · 2001 · 23 citations

, , +11

1–1 of 1