Concepedia

D. Pirkle

DP

Statistics

Publications

2

Citations

35

H-Index

2

Active since

1993

Affiliations

Lam Research (United States)(Current)

D. Pirkle is an author at Lam Research (United States) specializing in applied physics, engineering, and microelectronics.

Top concepts

EngineeringApplied PhysicsThin FilmsSurface ScienceMaterial ScienceMicroelectronicsSingle Event EffectsElectrical Engineering

Publications per year

1993–1995

2

Publications

2

Control of Plasma Damage to Gate Oxide during High Density Plasma Chemical Vapor Deposition

Subhas Bothra, Calvin T. Gabriel, Stephan E. Lassig et al. · Journal of The Electrochemical Society · 1995 · 24 citations

High Density, Electrical Engineering, Gate Oxide +12

Biased Electron Cyclotron Resonance Chemical-Vapor Deposition of Silicon Dioxide Inter-Metal Dielectric Thin Films

P. K. Shufflebotham, Mark T. Weise, D. Pirkle et al. · Materials science forum · 1993 · 11 citations

Materials Science, Engineering, Silicon On Insulator +6

1–2 of 2