P. K. Shufflebotham

Diagnostic techniques for plasma stability in electron cyclotron resonance plasma processing

P. K. Shufflebotham, D. J. Thomson · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 20 citations

Parameter Space, Engineering, Plasma Science +16

Experimental validation of a direct simulation by Monte Carlo molecular gas flow model

P. K. Shufflebotham, Timothy Bartel, Butch Berney · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 20 citations

Engineering, Experimental Validation, Fluid Mechanics +25

Investigation of the amorphous-to-microcrystalline transition of hydrogenated silicon films by spectroscopic ellipsometry

T. V. Herak, John J. Schellenberg, P. K. Shufflebotham et al. · Journal of Applied Physics · 1988 · 15 citations

Engineering, Ellipsometric Data Analysis, Silicon On Insulator +16

Behavior of downstream plasmas generated in a microwave plasma chemical-vapor deposition reactor

P. K. Shufflebotham, D. J. Thomson, H.C. Card · Journal of Applied Physics · 1988 · 14 citations

Engineering, Microwave Power, Downstream Plasmas +17

Effects of substrate bias on structure and properties of a-Si:H films deposited by ECR microwave plasmas

T. V. Herak, T. T. Chau, S. R. Mejia et al. · Journal of Non-Crystalline Solids · 1987 · 11 citations

Engineering, Substrate Bias, Physics +7