T. T. Chau

Microwave plasmas for low-temperature dry sterilization

T. T. Chau, Kwan C. Kao, G. Blank et al. · Biomaterials · 1996 · 98 citations

Low-temperature Dry Sterilization, Electrical Engineering, Plasma Processing +1

Low-temperature deposition of silicon dioxide films from electron cyclotron resonant microwave plasmas

T. V. Herak, T. T. Chau, D. J. Thomson et al. · Journal of Applied Physics · 1989 · 53 citations

Engineering, Crystalline Silicon Substrates, Silicon Dioxide Films +18

Thickness dependence of the dielectric behavior of SiO2 films fabricated by microwave electron cyclotron resonance plasmas

T. T. Chau, S. R. Mejia, K. C. Kao · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 16 citations

Engineering, Silicon On Insulator, Sio2 Films +17

Optical emission spectra of microwave oxygen plasmas and fabrication of SiO2 films

T. T. Chau, K. C. Kao · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 16 citations

Optical Materials, Engineering, Chemistry +16

Effects of substrate bias on structure and properties of a-Si:H films deposited by ECR microwave plasmas

T. V. Herak, T. T. Chau, S. R. Mejia et al. · Journal of Non-Crystalline Solids · 1987 · 11 citations

Engineering, Substrate Bias, Physics +7