S. R. Mejia

Low-temperature deposition of silicon dioxide films from electron cyclotron resonant microwave plasmas

T. V. Herak, T. T. Chau, D. J. Thomson et al. · Journal of Applied Physics · 1989 · 53 citations

Engineering, Crystalline Silicon Substrates, Silicon Dioxide Films +18

Electron-cyclotron-resonant microwave plasma system for thin-film deposition

S. R. Mejia, R.D. McLeod, K. C. Kao et al. · Review of Scientific Instruments · 1986 · 18 citations

Solid Films, Magnetism, Electrical Engineering +14

Thickness dependence of the dielectric behavior of SiO2 films fabricated by microwave electron cyclotron resonance plasmas

T. T. Chau, S. R. Mejia, K. C. Kao · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 16 citations

Engineering, Silicon On Insulator, Sio2 Films +17

Effects of substrate bias on structure and properties of a-Si:H films deposited by ECR microwave plasmas

T. V. Herak, T. T. Chau, S. R. Mejia et al. · Journal of Non-Crystalline Solids · 1987 · 11 citations

Engineering, Substrate Bias, Physics +7

New approach to low temperature deposition of high-quality thin films by electron cyclotron resonance microwave plasmas

T. T. Chau, S. R. Mejia, K. C. Kao · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 11 citations

Engineering, Plasma Physics, Electron Cyclotron Resonance +17