Edgar Lodermeier

SPM investigation of diamond-like carbon and carbon nitride films

Dongping Liu, Günther Benstetter, Edgar Lodermeier et al. · Surface and Coatings Technology · 2003 · 45 citations

Materials Science, Diamond-like Carbon, Engineering +3

Conductivity and Charge Trapping After Electrical Stress in Amorphous and Polycrystalline $\hbox{Al}_{2}\hbox{O}_{3}\hbox{-Based}$ Devices Studied With AFM-Related Techniques

Mario Lanza, M. Porti, X. Aymerich et al. · IEEE Transactions on Nanotechnology · 2010 · 36 citations

Engineering, Emerging Memory Technology, Si Diffusion +23

Influence of the incident angle of energetic carbon ions on the properties of tetrahedral amorphous carbon (ta-C) films

Dongping Liu, Günther Benstetter, Edgar Lodermeier et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 33 citations

Engineering, Vacuum Device, Chemistry +18

Influence of the manufacturing process on the electrical properties of thin (<4nm) Hafnium based high-k stacks observed with CAFM

Mario Lanza, M. Porti, M. Nafrı́a et al. · Microelectronics Reliability · 2007 · 30 citations

Materials Engineering, Materials Science, Electrical Engineering +10

Surface roughness, mechanical and tribological properties of ultrathin tetrahedral amorphous carbon coatings from atomic force measurements

Dongping Liu, Günther Benstetter, Edgar Lodermeier · Thin Solid Films · 2003 · 27 citations

Materials Science, Tribological Coating, Engineering +8