Tomoyuki Sakoda

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Publications

Citations

149

H-Index

Active since

1997

Affiliations

Texas Instruments (United States)(Current)

Agilent Technologies (United States)

Tomoyuki Sakoda is an author at Texas Instruments (United States) specializing in materials engineering, materials science, and ferroelectric ceramics.

Publications per year

1997–2003

Publications

Preparation of Pb(Zr,Ti)O3 thin films by metalorganic chemical vapor deposition for low voltage ferroelectric memory

Stephen R. Gilbert, Stevan Hunter, Debbie Ritchey et al. · Journal of Applied Physics · 2003 · 44 citations

Natural Sciences, Materials Engineering, Materials Science +17

Demonstration of scaled (⩾0.12 μm2) Pb(Zr,Ti)O3 capacitors on W plugs with Al interconnect

Scott R. Summerfelt, T. S. Moise, Guoqiang Xing et al. · Applied Physics Letters · 2001 · 39 citations

Engineering, Materials Engineering, Materials Science +17

Hydrogen-Robust Submicron IrO<sub>x</sub>/Pb(Zr, Ti)O<sub>3</sub>/Ir Capacitors for Embedded Ferroelectric Memory

Tomoyuki Sakoda, T. S. Moise, Scott R. Summerfelt et al. · Japanese Journal of Applied Physics · 2001 · 31 citations

Engineering, Materials Engineering, Materials Science +17

Effects of post-oxidation annealing on 3nm-thick low-temperature-grown gate oxide

Tomoyuki Sakoda, M. Matsumura, Yasushiro Nishioka · Applied Surface Science · 1997 · 22 citations

Engineering, Materials Engineering, Materials Science +11

Characterization of Switching Properties of Lead-Zirconate-Titanate Thin Films in Ti-Rich Phase

Katsuhiro Aoki, Tomoyuki Sakoda, Yukio Fukuda · Japanese Journal of Applied Physics · 1998 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +17

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