Concepedia

D. E. Ibbotson

DE

2

Publications

46

Citations

2

H-Index

1994

Active since

Affiliations

AT&T (United States)(Current)

Massachusetts Institute of Technology

D. E. Ibbotson is an author at AT&T (United States) specializing in applied physics, engineering, and physics.

Top concepts

PhysicsEngineeringApplied PhysicsCosmic RayPlasma TheoryPlasma PhysicsPlasma ScienceElectron DensityMicroelectronicsMicrofabrication

Publications per year

1994–1994

2

Publications

2

Comparison of advanced plasma sources for etching applications. I. Etching rate, uniformity, and profile control in a helicon and a multiple electron cyclotron resonance source

I. Tepermeister, N. Blayo, F. Klemens et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 28 citations

I. Etching Rate, Electrical Engineering, Polysilicon Films +13

Comparison of advanced plasma sources for etching applications. II. Langmuir probe studies of a helicon and a multipole electron cyclotron resonance source

I. Tepermeister, D. E. Ibbotson, J. T. C. Lee et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 18 citations

Langmuir Probe Studies, Plasma Uniformity, Engineering +20

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