Concepedia

Frank Bose

FB

3

Publications

141

Citations

3

H-Index

1993

Active since

Affiliations

ETH Zurich(Current)

Frank Bose is an author at ETH Zurich specializing in engineering, electrical engineering, and electrical insulation.

Top concepts

EngineeringElectrical EngineeringPulse PowerApplied PhysicsMicroelectronicsElectrical InsulationPhysicsPlasma TheoryPlasma PhysicsPlasma Science

Publications per year

1993–1997

3

Publications

3

Global model for high pressure electronegative radio-frequency discharges

Yoocheon Lee, M. A. Lieberman, A. J. Lichtenberg et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 66 citations

Engineering, Glow Discharge, Plasma Science +17

Application of a high density inductively coupled plasma reactor to polysilicon etching

Roger Patrick, Philippe Schoenborn, Harry Toda et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 53 citations

High Density, Electrical Engineering, Plasma Reactor +15

Characterization of plasma etch processes using measurements of discharge impedance

Frank Bose, Roger Patrick, H. Baltes · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 22 citations

Polysilicon Film, Electrical Engineering, Engineering +13

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