Concepedia

Harry Toda

HT

1

Publications

53

Citations

1

H-Index

1993

Active since

Harry Toda is an author specializing in applied physics, engineering, and electrical engineering.

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Publications per year

1993–1993

1

Publications

1

Application of a high density inductively coupled plasma reactor to polysilicon etching

Roger Patrick, Philippe Schoenborn, Harry Toda et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 53 citations

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