Concepedia

Philippe Schoenborn

PS

3

Publications

137

Citations

3

H-Index

1989

Active since

Affiliations

University of Alberta(Current)

Philippe Schoenborn is an author at University of Alberta specializing in applied physics, engineering, and plasma simulation.

Top concepts

Publications per year

1989–1999

3

Publications

3

Application of a high density inductively coupled plasma reactor to polysilicon etching

Roger Patrick, Philippe Schoenborn, Harry Toda et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 53 citations

, , +15

Analytical modeling of silicon etch process in high density plasma

Shahram Abdollahi-Alibeik, J.P. McVittie, Krishna C. Saraswat et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 49 citations

, , +16

Numerical Simulation of a  CF 4 /  O 2 Plasma and Correlation with Spectroscopic and Etch Rate Data

Philippe Schoenborn, Roger Patrick, Henry Baltes · Journal of The Electrochemical Society · 1989 · 35 citations

, , +18

Rows per page

1–3 of 3