Concepedia

S. H. Cho

SH

Statistics

Publications

2

Citations

38

H-Index

2

Active since

2005

Affiliations

Sungkyunkwan University(Current)

S. H. Cho is an author at Sungkyunkwan University specializing in etching processes, natural sciences, and silicon nitride.

Publications per year

2005–2012

2

Publications

2

Effect of high-frequency variation on the etch characteristics of ArF photoresist and silicon nitride layers in dual frequency superimposed capacitively coupled plasma

D. H. Kim, C. H. Lee, S. H. Cho et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 24 citations

, , +17

Silicon nitride etch characteristics in SF6/O2 and C3F6O/O2 plasmas and evaluation of their global warming effects

I. -J. Kim, H.K. Moon, J.H. Lee et al. · Microelectronics Reliability · 2012 · 14 citations

, , +14

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