Concepedia

H.K. Moon

HM

Statistics

Publications

2

Citations

25

H-Index

2

Active since

2010

Affiliations

Sungkyunkwan University(Current)

H.K. Moon is an author at Sungkyunkwan University specializing in microelectronics, applied physics, and engineering.

Top concepts

Publications per year

2010–2012

2

Publications

2

Silicon nitride etch characteristics in SF6/O2 and C3F6O/O2 plasmas and evaluation of their global warming effects

I. -J. Kim, H.K. Moon, J.H. Lee et al. · Microelectronics Reliability · 2012 · 14 citations

, , +7

Improvement in etch selectivity of SiO2 to CVD amorphous carbon mask in dual-frequency capacitively coupled C4F8/CH2F2/O2/Ar plasmas

B. S. Kwon, J.S. Kim, H.K. Moon et al. · Thin Solid Films · 2010 · 11 citations

, , +7

1–2 of 2