Concepedia

B. S. Kwon

BS

Statistics

Publications

2

Citations

49

H-Index

2

Active since

2010

Affiliations

Sungkyunkwan University(Current)

B. S. Kwon is an author at Sungkyunkwan University specializing in chemical engineering, applied physics, and engineering.

Top concepts

Publications per year

2010–2010

2

Publications

2

Ultrahigh Selective Etching of SiO[sub 2] Using an Amorphous Carbon Mask in Dual-Frequency Capacitively Coupled C[sub 4]F[sub 8]/CH[sub 2]F[sub 2]/O[sub 2]/Ar Plasmas

B. S. Kwon, Kim Js, Nae‐Eung Lee et al. · Journal of The Electrochemical Society · 2010 · 38 citations

, , +15

Improvement in etch selectivity of SiO2 to CVD amorphous carbon mask in dual-frequency capacitively coupled C4F8/CH2F2/O2/Ar plasmas

B. S. Kwon, J.S. Kim, H.K. Moon et al. · Thin Solid Films · 2010 · 11 citations

, , +7

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