Concepedia

C. H. Lee

CH

1

Publications

24

Citations

1

H-Index

2005

Active since

Affiliations

Jusung Engineering (South Korea)(Current)

C. H. Lee is an author at Jusung Engineering (South Korea) specializing in optical properties, applied physics, and electrical engineering.

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Publications per year

2005–2005

1

Publications

1

Effect of high-frequency variation on the etch characteristics of ArF photoresist and silicon nitride layers in dual frequency superimposed capacitively coupled plasma

D. H. Kim, C. H. Lee, S. H. Cho et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 24 citations

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