Concepedia

Anthony Garetto

AG

3

Publications

42

Citations

3

H-Index

2012

Active since

Affiliations

Carl Zeiss (Germany)(Current)

Anthony Garetto is an author at Carl Zeiss (Germany) specializing in engineering, ophthalmology, and radiation imaging.

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Publications per year

2012–2014

3

Publications

3

Aerial imaging technology for photomask qualification: from a microscope to a metrology tool

Anthony Garetto, Thomas Scherübl, Jan Hendrik Peters · Advanced Optical Technologies · 2012 · 17 citations

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Actinic review of EUV masks: first results from the AIMS EUV system integration

Markus R. Weiss, Dirk Hellweg, Jan Hendrik Peters et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 14 citations

Defect mitigation considerations for EUV photomasks

Anthony Garetto, Renzo Capelli, Frederik Blumrich et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 11 citations

, , +9

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