Statistics
Publications
4
Citations
79
H-Index
4
Active since
1976
Affiliations
IBM (United States)(Current)
Edward V. Weber is an author at IBM (United States) specializing in electron beam lithography, manufacturing engineering, and engineering.
Publications per year
1976–1993
4
4
EL-4, a new generation electron-beam lithography system
H. C. Pfeiffer, Donald Edward Davis, W. A. Enichen et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 22 citations
Engineering, Manufacturing Engineering, Mechanical Engineering +17
1–4 of 4