Concepedia

L. Pfitzner

LP

Statistics

Publications

8

Citations

209

H-Index

8

Active since

1998

Affiliations

Fraunhofer Institute for Integrated Systems and Device Technology(Current)

Schott (Germany)

Infineon Technologies (Germany)

Fraunhofer Institute for Integrated Circuits

Friedrich-Alexander-Universität Erlangen-Nürnberg

L. Pfitzner is an author at Fraunhofer Institute for Integrated Systems and Device Technology specializing in engineering, systems engineering, and calibration.

Top concepts

Publications per year

1998–2018

8

Publications

8

From overall equipment efficiency (OEE) to overall Fab effectiveness (OFE)

R. Oechsner, Markus Pfeffer, L. Pfitzner et al. · Materials Science in Semiconductor Processing · 2002 · 100 citations

, , +8

Reducing airborne molecular contamination by efficient purging of FOUPs for 300-mm wafers-the influence of materials properties

J. Frickinger, J. Bugler, G. Zielonka et al. · IEEE Transactions on Semiconductor Manufacturing · 2000 · 34 citations

, , +17

In situ spectroscopic ellipsometry for advanced process control in vertical furnaces

Werner Lehnert, R. Berger, Claus M. Schneider et al. · Thin Solid Films · 1998 · 16 citations

, , +7

Feasibility Evaluation of Virtual Metrology for the Example of a Trench Etch Process

Georg Roeder, Sirko Winzer, Martin Schellenberger et al. · IEEE Transactions on Semiconductor Manufacturing · 2014 · 14 citations

, , +19

Cost reduction strategies for wafer expenditure

L. Pfitzner, Norbert Benesch, Richard Öchsner et al. · Microelectronic Engineering · 2001 · 13 citations

, , +5

1–5 of 8