Concepedia

J. Frickinger

JF

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Publications

1

Citations

34

H-Index

1

Active since

2000

Affiliations

Jenoptik (Germany)(Current)

J. Frickinger is an author at Jenoptik (Germany) specializing in environmental engineering, materials properties, and environmental remediation.

Top concepts

Publications per year

2000–2000

1

Publications

1

Reducing airborne molecular contamination by efficient purging of FOUPs for 300-mm wafers-the influence of materials properties

J. Frickinger, J. Bugler, G. Zielonka et al. · IEEE Transactions on Semiconductor Manufacturing · 2000 · 34 citations

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