R. Berger

Statistics

Publications

Citations

201

H-Index

Active since

1995

Affiliations

Friedrich-Alexander-Universität Erlangen-Nürnberg(Current)

Institute for Technical Physics and Materials Science

Fraunhofer Institute for Integrated Circuits

Schott (Germany)

R. Berger is an author at Friedrich-Alexander-Universität Erlangen-Nürnberg specializing in materials science, spectroscopic ellipsometry, and natural sciences.

Publications per year

1995–2002

Publications

Comparative study of surface roughness measured on polysilicon using spectroscopic ellipsometry and atomic force microscopy

P. Petrík, László Péter Biró, M. Fried et al. · Thin Solid Films · 1998 · 101 citations

Natural Sciences, Materials Science, Physics +17

Comparative study of polysilicon-on-oxide using spectroscopic ellipsometry, atomic force microscopy, and transmission electron microscopy

P. Petrík, M. Fried, T. Lohner et al. · Thin Solid Films · 1998 · 36 citations

Natural Sciences, Materials Engineering, Materials Science +15

In situ preparation of epitaxial TlBa2Ca2Cu3O9 high-T c thin films

N. Reschauer, U. Spreitzer, W. Brozio et al. · Applied Physics Letters · 1996 · 20 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14

Visualization of craters in a Langmuir–Blodgett film from the impact of 23 MeV C ions

Ch. Tomaschko, M. Schurr, R. Berger et al. · Rapid Communications in Mass Spectrometry · 1995 · 16 citations

Natural Sciences, Materials Science, Physics +15

In situ spectroscopic ellipsometry for advanced process control in vertical furnaces

Werner Lehnert, R. Berger, Claus M. Schneider et al. · Thin Solid Films · 1998 · 16 citations

Engineering, Chemical Engineering, Chemistry +14

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