Herschel M. Marchman

Serial Section Scanning Electron Microscopy of Adult Brain Tissue Using Focused Ion Beam Milling

Graham Knott, Herschel M. Marchman, David S. Wall et al. · Journal of Neuroscience · 2008 · 724 citations · Full text

Microscopy, Synaptic Transmission, Visual Neuroscience +23

Integration of unit processes in a shallow trench isolation module for a 0.25 μm complementary metal–oxide semiconductor technology

Amitava Chatterjee, Inayat Ali, K. Joyner et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 27 citations

Unit Processes, Electrical Engineering, Engineering +11

Nanometer-scale dimensional metrology for advanced lithography

Herschel M. Marchman, J. E. Griffith, Jerry Z. Y. Guo et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 23 citations

Engineering, Electron-beam Lithography, Microscopy +28

Impact of line width roughness on device performance

Gian F. Lorusso, Leonardus H. A. Leunissen, C. Gustin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 17 citations

Electrical Engineering, Engineering, Measurement +11

Dimensional metrology with scanning probe microscopes

J. E. Griffith, Herschel M. Marchman, G. L. Miller et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 14 citations

Engineering, Measurement, Microscopy +18