Herschel M. Marchman

Serial Section Scanning Electron Microscopy of Adult Brain Tissue Using Focused Ion Beam Milling

Graham Knott, Herschel M. Marchman, David S. Wall et al. · Journal of Neuroscience · 2008 · 734 citations · Full text

Medicine, Neurobiology, Neuroscience +17

Integration of unit processes in a shallow trench isolation module for a 0.25 μm complementary metal–oxide semiconductor technology

Amitava Chatterjee, Inayat Ali, K. Joyner et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 27 citations

Engineering, Electrical Engineering, Interface Science +7

Nanometer-scale dimensional metrology for advanced lithography

Herschel M. Marchman, J. E. Griffith, Jerry Z. Y. Guo et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 23 citations

Engineering, Manufacturing Engineering, Materials Science +17

Impact of line width roughness on device performance

Gian F. Lorusso, Leonardus H. A. Leunissen, C. Gustin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 17 citations

Engineering, Electrical Engineering, Materials Engineering +17

Dimensional metrology with scanning probe microscopes

J. E. Griffith, Herschel M. Marchman, G. L. Miller et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 14 citations

Engineering, Materials Engineering, Materials Science +16