A. Mahajan

Direct evidence for β-hydride elimination on Si (100)

Lori A. Keeling, Li Chen, C. Michael Greenlief et al. · Chemical Physics Letters · 1994 · 34 citations

Inorganic Chemistry, Direct Evidence, Chemistry +1

Adsorption and decomposition of diethylsilane and diethylgermane on Si(100): Surface reactions for an atomic layer epitaxial approach to column IV epitaxy

B. K. Kellerman, A. Mahajan, N. M. Russell et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 19 citations

Engineering, Adsorption Process, Chemistry +17

Si atomic layer epitaxy based on Si2H6 and remote He plasma bombardment

A. Mahajan, J. Irby, D. Kinosky et al. · Thin Solid Films · 1993 · 15 citations

Physics, Applied Physics, Semiconductor Device Fabrication +4

Surface chemistry of diethylsilane and diethylgermane on Si(100): An atomic layer epitaxy approach

A. Mahajan, B. K. Kellerman, N. M. Russell et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 15 citations

Surface Characterization, Engineering, Electronic Materials +14

Advances in remote plasma-enhanced chemical vapor deposition for low temperature In situ hydrogen plasma clean and Si and Si1-xGex epitaxy

Tsan‐sheng Hsu, B. Anthony, Ruizhe Qian et al. · Journal of Electronic Materials · 1992 · 14 citations

Materials Science, Plasma Electronics, Engineering +9