Concepedia

Publication | Closed Access

Si atomic layer epitaxy based on Si2H6 and remote He plasma bombardment

DOI

15

Citations

7

References

1993

Year

A. Mahajan, J. Irby, D. Kinosky, Ruizhe Qian, Samuel Thomas, Sanjay K. Banerjee, A.F. Tasch, T. Picraux
Thin Solid Films

References

YearCitations

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