Concepedia

S. T. Palmacci

ST

Statistics

Publications

13

Citations

528

H-Index

12

Active since

1997

Affiliations

Massachusetts Institute of Technology(Current)

MIT Lincoln Laboratory

S. T. Palmacci is an author at Massachusetts Institute of Technology specializing in natural sciences, photonics, and materials science.

Publications per year

1997–2013

13

Publications

13

Lithography with 157 nm lasers

T. M. Bloomstein, Mark W. Horn, M. Rothschild et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 105 citations · Full text

Engineering, Materials Engineering, Materials Science +14

All silicon infrared photodiodes: photo response and effects of processing temperature

M. W. Geis, S. J. Spector, Matthew E. Grein et al. · Optics Express · 2007 · 74 citations · Full text

Engineering, Electrical Engineering, Materials Science +16

Critical issues in 157 nm lithography

T. M. Bloomstein, M. Rothschild, Rainer Kunz et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 64 citations

Natural Sciences, Materials Engineering, Materials Science +17

Noncontact detection of homemade explosive constituents via photodissociation followed by laser-induced fluorescence

Charles M. Wynn, S. T. Palmacci, Roderick R. Kunz et al. · Optics Express · 2010 · 54 citations · Full text

Natural Sciences, Chemistry, Materials Science +16

Liquid immersion lithography: Why, how, and when?

M. Rothschild, T. M. Bloomstein, Roderick R. Kunz et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 49 citations

Natural Sciences, Materials Engineering, Materials Science +13

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