Concepedia

Author

J. S. Kraus

Max Planck Institute for Plasma Physics

Also Known As

J Kraus, J. Kraus, J. S. Kraus, Joseph Kraus, Joseph S. Kraus

16

Publications

345

Citations

9

H-Index

29

Concepts

All Affiliations

Max Planck Institute for Plasma PhysicsMax Planck Society
JS

About

J. S. Kraus is an author at Max Planck Institute for Plasma Physics specializing in applied physics, engineering, and physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

6

6

269

2

Applied Physics

6

6

269

3

Natural Sciences

3

3

164

4

Social Sciences

1

1

11

5

Chemistry

1

1

32

J. S. Kraus

×

6

Publications

269

Citations

6

H-Index

YearCitations

Angular Dependence of Oscillatory Structure in Low-Energy Ion-Surface Scattering

N. H. Tolk, John C. Tully, J. S. Kraus,

Physical Review Letters

1976

98

Projection electron-beam lithography: A new approach

S. D. Berger, J. M. Gibson, R. M. Camarda,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

1991

73

Photon emission from rare gas ion bombardment of metal surfaces

W. Heiland, J. S. Kraus, S. Y. Leung,

Surface Science

1977

34

Optical radiation from low-energy hydrogen atomic and molecular ion-surface collisions

Suet Yi Leung, N. H. Tolk, W. Heiland,

Physical review. A, General physics

1978

32

Preliminary results from a prototype projection electron-beam stepper-scattering with angular limitation projection electron beam lithography proof-of-concept system

L. R. Harriott, S. D. Berger, C. J. Biddick,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

1996

21

SCALPEL proof-of-concept system: preliminary lithography results

W. K. Waskiewicz, Christopher J. Biddick, Myrtle I. Blakey,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

1997

11

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