Yasuichi Mitsushima

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Active since

1997

Affiliations

Toyota Central Research and Development Laboratories (Japan)(Current)

Yasuichi Mitsushima is an author at Toyota Central Research and Development Laboratories (Japan) specializing in materials science, semiconductor devices, and engineering.

Publications per year

1997–2002

Publications

Silicon Needles Fabricated by Highly Selective Anisotropic Dry Etching and Their Field Emission Current Characteristics

Masakazu Kanechika, Yasuichi Mitsushima · Japanese Journal of Applied Physics · 2000 · 17 citations

Engineering, Electrical Engineering, Materials Science +15

Control of shape of silicon needles fabricated by highly selective anisotropic dry etching

Masakazu Kanechika, Noriaki Sugimoto, Yasuichi Mitsushima · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 16 citations

Engineering, Electrical Engineering, Materials Science +14

Mechanism of Residue Formation in Silicon Trench Etching Using a Bromine-Based Plasma

Tetsuo Hayakawa, Takashi Suzuki, Tsutomu Uesugi et al. · Japanese Journal of Applied Physics · 1998 · 13 citations

Engineering, Materials Engineering, Materials Science +17

New 3-D lateral power MOSFETs with ultra low on-resistance

Tsutomu Uesugi, Masahito Kodama, Sachiko Kawaji et al. · 2002 · 12 citations

Engineering, Electrical Engineering, Microelectronics +13

Preferred Orientation in Ti Films Sputter-Deposited on SiO<sub>2</sub> Glass: The Role of Water Chemisorption on the Substrate

Takeshi Ohwaki, Tomoyuki Yoshida, Shoji Hashimoto et al. · Japanese Journal of Applied Physics · 1997 · 11 citations

Natural Sciences, Materials Engineering, Materials Science +17

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