Statistics
Publications
3
Citations
86
H-Index
3
Active since
1998
Affiliations
Ihsan J. Djomehri is an author at Massachusetts Institute of Technology specializing in engineering, electrical engineering, and microelectronics.
Publications per year
1998–2002
3
3
Zone-plate-array lithography in the deep ultraviolet
Ihsan J. Djomehri, T. A. Savas, Henry I. Smith · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 19 citations
Engineering, Electrical Engineering, Manufacturing Engineering +14
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