S. Kronmueller - Concepedia

Author

S. Kronmueller

Also Known As

S. Kronmueller, Silvia Kronmueller

Publications

Citations

H-Index

Concepts

All Affiliations

S. Kronmueller is an author at Robert Bosch (Germany) specializing in microelectronics, microfabrication, and engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	63
2	Electrical Engineering	2	2	50
3	Applied Physics	1	1	20
4	Biomedical Engineering	1	1	30
5	Materials Engineering	1	1	20

S. Kronmueller

Publications

Citations

H-Index

Page 1

	Year	Citations
Wafer-scale film encapsulation of micromachined accelerometers Woo‐Tae Park, Rob N. Candler, S. Kronmueller, Materials ScienceAdvanced PackagingElectrical EngineeringSuccessful Mems DevicesEngineering	2004	30
A novel sacrificial layer technology based on highly selective etching of silicon-germanium in CLF3 Christina Leinenbach, H. Seidel, Tino Fuchs, Selective EtchingEngineeringNew PlasmalessSilicon On InsulatorSilicene	2007	20
Thin film encapsulation of acceleration sensors using polysilicon sacrificial layers H. Stahl, A. Hoechst, Frank Fischer, Mems DevicesEngineeringThin Film EncapsulationMechanical EngineeringThin Film Process Technology	2004	13

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