Concepedia
Statistics
Publications
1
Citations
13
H-Index
Active since
2004
Affiliations
IMEC(Current)
A. Hoechst is an author at IMEC specializing in polysilicon, wafer-level packaging, and accelerometers.
Publications per year
2004–2004
Thin film encapsulation of acceleration sensors using polysilicon sacrificial layers
H. Stahl, A. Hoechst, Frank Fischer et al. · 2004 · 13 citations
Engineering, Mechanical Engineering, Microelectromechanical Systems +16
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