Concepedia

Author

Norikatsu Sasao

Toshiba (Japan)

Also Known As

N. Sasao, Norikatsu Sasao

15

Publications

79

Citations

5

H-Index

18

Concepts

All Affiliations

Toshiba (Japan)
NS

About

Norikatsu Sasao is an author at Toshiba (Japan) specializing in microelectronics, materials science, and engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

2

2

36

2

Applied Physics

2

2

36

3

Materials Science

2

2

36

4

Microelectronics

2

2

36

5

Materials Fabrication

1

1

25

Norikatsu Sasao

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2

Publications

36

Citations

2

H-Index

YearCitations

Fabrication of 5 Tdot/in.2 bit patterned media with servo pattern using directed self-assembly

Naoko Kihara, Ryousuke Yamamoto, Norikatsu Sasao,

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

2012

25

Analysis of formation mechanism of deposited film in a high-aspect-ratio hole during dry etching using fluorocarbon gas plasmas

Noboru Hiwasa, Junji Kataoka, Norikatsu Sasao,

Applied Physics Express

2022

11

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