Concepedia

Norikatsu Sasao

NS

2

Publications

36

Citations

2

H-Index

2012

Active since

Affiliations

Toshiba (Japan)(Current)

Norikatsu Sasao is an author at Toshiba (Japan) specializing in microelectronics, materials science, and engineering.

Top concepts

Publications per year

2012–2022

2

Publications

2

Fabrication of 5 Tdot/in.2 bit patterned media with servo pattern using directed self-assembly

Naoko Kihara, Ryousuke Yamamoto, Norikatsu Sasao et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2012 · 25 citations

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Analysis of formation mechanism of deposited film in a high-aspect-ratio hole during dry etching using fluorocarbon gas plasmas

Noboru Hiwasa, Junji Kataoka, Norikatsu Sasao et al. · Applied Physics Express · 2022 · 11 citations · Full text

, , +15

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