Concepedia

Junji Kataoka

JK

1

Publications

11

Citations

1

H-Index

2022

Active since

Junji Kataoka is an author specializing in applied physics, thin films, and microfabrication.

Top concepts

Thin FilmsEngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabrication

Publications per year

2022–2022

1

Publications

1

Analysis of formation mechanism of deposited film in a high-aspect-ratio hole during dry etching using fluorocarbon gas plasmas

Noboru Hiwasa, Junji Kataoka, Norikatsu Sasao et al. · Applied Physics Express · 2022 · 11 citations · Full text

Materials Science, Engineering, Microfabrication +15

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