Concepedia

Author

Junji Kataoka

Also Known As

Junji Kataoka

4

Publications

20

Citations

2

H-Index

7

Concepts

JK

About

Junji Kataoka is an author specializing in applied physics, thin films, and microfabrication.

Top Concepts

#ConceptH-IndexPublicationsCitations

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Engineering

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Applied Physics

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Materials Science

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Microelectronics

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Thin Films

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Junji Kataoka

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1

Publications

11

Citations

1

H-Index

YearCitations

Analysis of formation mechanism of deposited film in a high-aspect-ratio hole during dry etching using fluorocarbon gas plasmas

Noboru Hiwasa, Junji Kataoka, Norikatsu Sasao,

Applied Physics Express

2022

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