Statistics
Publications
1
Citations
12
H-Index
1
Active since
2022
Noboru Hiwasa is an author specializing in dry etching, etching processes, and high-aspect-ratio structures.
Publications per year
2022–2022
1
1
Noboru Hiwasa, Junji Kataoka, Norikatsu Sasao et al. · Applied Physics Express · 2022 · 12 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
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