Statistics
Publications
17
Citations
340
H-Index
13
Active since
2010
Alexander R. Bruccoleri is an author at Massachusetts Institute of Technology specializing in engineering, applied physics, and x-ray imaging.
Publications per year
2010–2023
17
17
Plasma etch fabrication of 60:1 aspect ratio silicon nanogratings with 200 nm pitch
Pran Mukherjee, Alexander R. Bruccoleri, Ralf K. Heilmann et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 34 citations
Optical Materials, Engineering, Electron-beam Lithography +24
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