Pran Mukherjee

Diffraction efficiency of 200-nm-period critical-angle transmission gratings in the soft x-ray and extreme ultraviolet wavelength bands

Ralf K. Heilmann, Minseung Ahn, Alex R. Bruccoleri et al. · Applied Optics · 2011 · 39 citations

Transient Grating, Short Wavelength Optic, Optical Materials +18

Plasma etch fabrication of 60:1 aspect ratio silicon nanogratings with 200 nm pitch

Pran Mukherjee, Alexander R. Bruccoleri, Ralf K. Heilmann et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 34 citations

Optical Materials, Engineering, Electron-beam Lithography +24

Critical-angle transmission grating spectrometer for high-resolution soft x-ray spectroscopy on the International X-ray Observatory

Ralf K. Heilmann, John E. Davis, Daniel Dewey et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 32 citations · Full text

Optical Design, X-ray Spectroscopy, Engineering +22

Development of a critical-angle transmission grating spectrometer for the International X-Ray Observatory

Ralf K. Heilmann, Minseung Ahn, Marshall W. Bautz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 26 citations · Full text

X-ray Spectroscopy, Engineering, X-ray Reflection Gratings +18

Potassium hydroxide polishing of nanoscale deep reactive-ion etched ultrahigh aspect ratio gratings

Alexander R. Bruccoleri, Dong Guan, Pran Mukherjee et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2013 · 25 citations

X-ray Spectroscopy, Engineering, Electron-beam Lithography +22