Concepedia

G. O. Langner

GO

4

Publications

88

Citations

4

H-Index

1981

Active since

Affiliations

IBM (United States)(Current)

G. O. Langner is an author at IBM (United States) specializing in engineering, physics, and microscopy.

Top concepts

Publications per year

1981–1999

4

Publications

4

Advanced deflection concept for large area, high resolution e-beam lithography

H. C. Pfeiffer, G. O. Langner · Journal of Vacuum Science and Technology · 1981 · 36 citations

, , +23

Contactless electrical testing of large area specimens using electron beams

H. C. Pfeiffer, G. O. Langner, W. Stickel et al. · Journal of Vacuum Science and Technology · 1981 · 26 citations

, , +17

PREVAIL: Theory of the proof of concept column electron optics

W. Stickel, G. O. Langner · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 13 citations · Full text

, , +23

Variable axis lens for electron beams

H. C. Pfeiffer, G. O. Langner, M. A. Sturans · Applied Physics Letters · 1981 · 13 citations

, , +17

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