Y.T. Kim

Dependence of the bonding structure of DLC thin films on the deposition conditions of PECVD method

Y.T. Kim, S.M. Cho, Won Seok Choi et al. · Surface and Coatings Technology · 2003 · 52 citations

Materials Science, Materials Engineering, Engineering +10

PECVD SiO2 and SiON films dependant on the rf bias power for low-loss silica waveguide

Y.T. Kim, Do–Hyeon Kim, Dae Ho Yoon · Thin Solid Films · 2004 · 32 citations

Photonics, Electrical Engineering, Pecvd Sio2 +8

Comparision of residual stress and optical properties in Ta2O5 thin films deposited by single and dual ion beam sputtering

S.G. Yoon, Y.T. Kim, H.K. Kim et al. · Materials Science and Engineering B · 2005 · 32 citations

Materials Engineering, Materials Science, Optical Materials +12

Influence of hydrogen on SiO₂ thick film deposited by PECVD and FHD for silica optical waveguide

Y.T. Kim, S.M. Cho, Y.G. Seo et al. · Crystal Research and Technology · 2002 · 19 citations

Optical Materials, Engineering, Thin Film Process Technology +16

Influence of hydrogen on SiON thick film for silica waveguide deposited by PECVD and annealing effect

Y.T. Kim, S.M. Cho, Y.G. Seo et al. · Surface and Coatings Technology · 2003 · 15 citations

Materials Engineering, Materials Science, Engineering +10