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Influence of hydrogen on SiON thick film for silica waveguide deposited by PECVD and annealing effect

DOI

15

Citations

11

References

2003

Year

Y.T. Kim, S.M. Cho, Y.G. Seo, H.D. Yoon, Yun‐Taek Im, Dae Ho Yoon
Surface and Coatings Technology

References

YearCitations

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