Comparision of residual stress and optical properties in Ta2O5 thin films deposited by single and dual ion beam sputtering - Concepedia

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Comparision of residual stress and optical properties in Ta2O5 thin films deposited by single and dual ion beam sputtering

32

Citations

7

References

2005

Year

S.G. Yoon, Y.T. Kim, H.K. Kim, M.J. Kim, H.M. Lee, Dae Ho Yoon

Materials Science and Engineering B

Materials EngineeringMaterials ScienceOptical MaterialsEngineeringMaterial AnalysisPhysicsOptical PropertiesOxide ElectronicsSurface ScienceApplied PhysicsTa2o5 Thin FilmsResidual StressThin FilmsDepth-graded Multilayer CoatingThin Film Processing

References

	Year	Citations

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