Comparision of residual stress and optical properties in Ta2O5 thin films deposited by single and dual ion beam sputtering

The tension of metallic films deposited by electrolysis

G. Stoney · Proceedings of the Royal Society of London Series A Containing Papers of a Mathematical and Physical Character · 1909 · 4.8K citations · Full text

Natural Sciences, Chemistry, Materials Science +11

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H. Windischmann · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 1992 · 644 citations

Natural Sciences, Materials Engineering, Materials Science +14

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M. Doerner, William D. Nix · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 1988 · 604 citations

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Metallurgical topics in silicon device interconnections: Thin film stresses

F. M. d’Heurle · International Materials Reviews · 1989 · 91 citations

Engineering, Electrical Engineering, Materials Science +17

Ion Beam Sputter Deposition Of Optical Coatings

J. R. Sites, P. Gilstrap, Rong Rujkorakarn · Optical Engineering · 1983 · 48 citations

Natural Sciences, Materials Engineering, Materials Science +14