Dependence of the bonding structure of DLC thin films on the deposition conditions of PECVD method - Concepedia

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Dependence of the bonding structure of DLC thin films on the deposition conditions of PECVD method

52

Citations

10

References

2003

Year

Y.T. Kim, S.M. Cho, Won Seok Choi, B. Hong, Dae Ho Yoon

Surface and Coatings Technology

Materials ScienceMaterials EngineeringEngineeringSurface ScienceApplied PhysicsPecvd MethodChemical Vapor DepositionBonding StructureThin FilmsPulsed Laser DepositionChemical DepositionDlc Thin FilmsThin Film Processing

References

	Year	Citations

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