PECVD SiO2 and SiON films dependant on the rf bias power for low-loss silica waveguide - Concepedia

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PECVD SiO2 and SiON films dependant on the rf bias power for low-loss silica waveguide

32

Citations

9

References

2004

Year

Y.T. Kim, Do–Hyeon Kim, Dae Ho Yoon

Thin Solid Films

PhotonicsElectrical EngineeringPecvd Sio2EngineeringApplied PhysicsSion Films DependantGuided-wave OpticSilicon On InsulatorOptoelectronicsPlanar Waveguide SensorRf Bias Power

References

	Year	Citations

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