Concepedia

Keita Ishizuka

KI

3

Publications

34

Citations

3

H-Index

2004

Active since

Affiliations

Tokyo Ohka Kogyo (Japan)(Current)

Keita Ishizuka is an author at Tokyo Ohka Kogyo (Japan) specializing in microelectronics, applied physics, and microfabrication.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsMicrofabricationElectronic PackagingSurface SciencePolymersThin Films3D Printing

Publications per year

2004–2006

3

Publications

3

Progress of topcoat and resist development for 193nm immersion lithography

Katsumi Ohmori, Tomoyuki Ando, Toshikazu Takayama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 12 citations

Engineering, Electron-beam Lithography, Polymer Nanocomposites +23

Development Status of High Performance Materials for Immersion Lithography

Masaaki Yoshida, Kotaro Endo, Keita Ishizuka et al. · Journal of Photopolymer Science and Technology · 2004 · 11 citations · Full text

Materials Engineering, Materials Science, Engineering +14

Defect studies of resist process for 193nm immersion lithography

Tomoyuki Ando, Katsumi Ohmori, Satoshi Maemori et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 11 citations

Engineering, Electron-beam Lithography, Beam Lithography +16

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