Highly Scaled Ruthenium Interconnects
Shibesh Dutta, Shreya Kundu, Anshul Gupta et al. · IEEE Electron Device Letters · 2017 · 95 citations
Natural Sciences, Electrical Engineering, Materials Science +17
Clément Porret, Andriy Hikavyy, Juan Fernando Gomez Granados et al. · ECS Journal of Solid State Science and Technology · 2019 · 31 citations · Full text
1–2 of 2