Elisabeth Penteker

Silicon fusion bonding and its characterization

Christine Harendt, Heinz‐Gerd Graf, B. Höfflinger et al. · Journal of Micromechanics and Microengineering · 1992 · 67 citations

Materials Science, Materials Engineering, Electrical Engineering +14

Silicon on insulator material by Wafer Bonding

Christine Harendt, Charles E. Hunt, Wolfgang Appel et al. · Journal of Electronic Materials · 1991 · 32 citations

Materials Science, Wafer Scale Processing, Engineering +6

Wafer bonding: Investigation and in situ observation of the bond process

Christine Harendt, Heinz‐Gerd Graf, Elisabeth Penteker et al. · Sensors and Actuators A Physical · 1990 · 29 citations

Materials Science, Material Analysis, Engineering +9

Wafer fusion bonding and its application to silicon-on-insulator fabrication

Christine Harendt, W. Appel, Heinz‐Gerd Graf et al. · Journal of Micromechanics and Microengineering · 1991 · 24 citations

Materials Science, Materials Engineering, Electrical Engineering +14

Assembly and embedding of ultra-thin chips in polymers

Mahadi-Ul Hassan, C. Schomburg, Christine Harendt et al. · 2013 · 23 citations

Engineering, Nanostructured Polymer, Ultra-thin Chips +22