C. Schomburg

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Active since

1997

Affiliations

Institut für Mikroelektronik Stuttgart(Current)

C. Schomburg is an author at Institut für Mikroelektronik Stuttgart specializing in microfabrication, engineering, and integrated circuit fabrication.

Publications per year

1997–2013

Publications

SOI wafer flow process for stencil mask fabrication

Joerg Butschke, Albrecht Ehrmann, B. Höfflinger et al. · Microelectronic Engineering · 1999 · 26 citations

Engineering, Manufacturing Engineering, Materials Engineering +14

Assembly and embedding of ultra-thin chips in polymers

Mahadi-Ul Hassan, C. Schomburg, Christine Harendt et al. · 2013 · 23 citations

Engineering, Electrical Engineering, Materials Science +16

Economic production of submicron ASICs with laser beam direct write lithography

C. Schomburg, B. Höfflinger, R. Springer et al. · Microelectronic Engineering · 1997 · 12 citations

Engineering, Materials Engineering, Materials Science +9

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