Neal B. Gallagher

The process chemometrics approach to process monitoring and fault detection

Barry M. Wise, Neal B. Gallagher · Journal of Process Control · 1996 · 846 citations

Engineering, Chemical Engineering, Chemistry +16

A comparison of principal component analysis, multiway principal component analysis, trilinear decomposition and parallel factor analysis for fault detection in a semiconductor etch process

Barry M. Wise, Neal B. Gallagher, Stephanie Watts Butler et al. · Journal of Chemometrics · 1999 · 291 citations

Engineering, Electrical Engineering, Instrumentation +16

AN INTRODUCTION TO LINEAR ALGEBRA

B. M. Wise, Neal B. Gallagher · Critical Reviews in Analytical Chemistry · 1998 · 236 citations

Natural Sciences, Computer Science, Mathematics +12

Development and Benchmarking of Multivariate Statistical Process Control Tools for a Semiconductor Etch Process: Improving Robustness through Model Updating

Neal B. Gallagher, Barry M. Wise, Stephanie Watts Butler et al. · IFAC Proceedings Volumes · 1997 · 84 citations

Engineering, Manufacturing Engineering, Systems Engineering +17

Curve resolution for multivariate images with applications to TOF-SIMS and Raman

Neal B. Gallagher, Jeremy M. Shaver, Elaine Martin et al. · Chemometrics and Intelligent Laboratory Systems · 2004 · 79 citations

Natural Sciences, Computer Science, Optics +7